| Material Type | Titanium | Theoretical Density (g/cc) | 4.5 |
|---|---|---|---|
| Symbol | Ti | Z Ratio | 0.628 |
| Atomic Weight | 47.867 | Sputter | DC |
| Atomic Number | 22 | Max Power Density* | 50 |
| Color/Appearance | Silvery Metallic | (Watts/Square Inch) | |
| Thermal Conductivity | 21.9 W/m.K | Type of Bond | Indium, Elastomer |
| Melting Point (°C) | 1,660 | Comments | Alloys with W/Ta/Mo; evolves gas on first heating. |
| Coefficient of Thermal Expansion | 8.6 x 10-6/K |
| Product Name | Titanium Sputtering Target | |
|---|---|---|
| CAS | 7440-32-6 | Confirm |
| Diameter | 50 mm ± 1mm | Confirm |
| Thickness | 3 mm ± 0.5mm | Confirm |
| Purity | >99.99% | Confirm |
| Density | 4.056 g/cm³ | Confirm |
| Molecular Weight | 47.867 g/mol | Confirm |
| Melting Point | 1668 °C | Confirm |
| Shape | Round | Confirm |
| Size and Shape | Targets diameter and thickness can be customized according to customers’requirements | |
| Backing Plate | Copper (as per customer requirement) | |
| Conclusion | The specifications conform with enterprise standard | |
| Main Inspect Verifier | Manager QC | |
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