Titanium Sputtering Target

Titanium Sputtering Target

Titanium is a common material found in a myriad of products including watches, drill bits, laptops, and bicycles, just to name a few. In pure form, it is lustrous and silvery-white in appearance. It has a melting point of 1,660°C, a density of 4.5 g/cc, and a vapor pressure of 10-4 Torr at 1,453°C. It is a sturdy material which is easily fabricated when heat is applied. Its strong, lightweight characteristics and excellent corrosion resistance make it ideal for ocean liner hulls, aircraft engines, and designer jewelry. Titanium is biocompatible so it can be found in surgical tools and implants. Titanium is generally evaporated in vacuum for the purposes of wear and decorative, semiconductor, and optical coatings.

Titanium Sputtering Target Properties

Material Type	Titanium	Theoretical Density (g/cc)	4.5
Symbol	Ti	Z Ratio	0.628
Atomic Weight	47.867	Sputter	DC
Atomic Number	22	Max Power Density*	50
Color/Appearance	Silvery Metallic	(Watts/Square Inch)
Thermal Conductivity	21.9 W/m.K	Type of Bond	Indium, Elastomer
Melting Point (°C)	1,660	Comments	Alloys with W/Ta/Mo; evolves gas on first heating.
Coefficient of Thermal Expansion	8.6 x 10-6/K

Titanium Sputtering Target Specifications

Product Name	Titanium Sputtering Target
CAS	7440-32-6	Confirm
Diameter	50 mm ± 1mm	Confirm
Thickness	3 mm ± 0.5mm	Confirm
Purity	>99.99%	Confirm
Density	4.056 g/cm³	Confirm
Molecular Weight	47.867 g/mol	Confirm
Melting Point	1668 °C	Confirm
Shape	Round	Confirm
Size and Shape	Targets Diameter and thickness can be according to Customer Requirement
Backing Plate	Copper (as per customer requirement)
Conclusion	The specifications Confirm with enterprise standard
Main Inspect Verifier	Manager QC

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