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    Vanadium Carbide Sputtering Targets

  • Introduction

    Vanadium carbide is the inorganic compound with the formula VC. It is an extremely hard refractory ceramic material. With a hardness of 9-9.5 Mohs, it is possibly the hardest metal-carbide known. It is of interest because it is prevalent in vanadium metal and alloys. Vanadium Carbide has an elastic modulus of approximately 380 GPa. Vanadium carbide (VC) thin films were deposited on silicon substrates by direct sputtering of a VC target in an argon atmosphere.
    Material Vanadium Carbide
    Chemical Formula VC
    Color/ Appearance Dark grey
    Melting point 2810℃
    Theoretical Density (g/cc) 5.77
    Z Ration 1
    Sputter RF
    Type of Bond  Indium, Elastomer

    Sizes & Purity

    Purity: 99.5%
    Size: Circular: Diameter <= 14inch, Thickness >= 1mm
    Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm


    1. Semiconductorchemical
    2. Vapor deposition (CVD) and physical vapor deposition (PVD) display
    3. Optical applications

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